This group of very high vacuum feedthroughs simplifies the job of connecting devices into vacuum/controlled atmosphere systems.

These feedthroughs satisfy their respective electrical and mechanical application functions while performing at very high vacuum levels.

Electrical Functions include: High Current, High Voltage, Instrumentation, RF, Motor and other Control.

Mechanical Functions include: High Speed and High Torque Rotary, Rectilinear – Including Push-Pull Manual, Motor and Piston Driven.

Fluidic Functions include: Gases, Cooling Fluids, Pressure Actuation.

APPLICATIONS

Include, but are not limited to, the following processes/systems:

• Electron Beam
• Sputtering
• Ion Plating
• Cathodic Arc
• Substrate Heating
• Furnaces
• Glow Discharge
• Plasma
• Resistance Deposition

Feedthroughs are compatible with Standard sized English or Metric mounting holes with the following common specifications:

• Mounting hole compatibility of all standard feedthroughs is: 1-inch (25.4mm) or 1 1/4-inch (32mm).
• Other special feedthrough hole specifications are noted.
• Provided with a generous amount of threaded body length for compatibility with most
  mounting plate thicknesses. Mounting plate thickness: 1/4-inch to 1 1/2-inch, depending on feedthrough type.
• Easily installed as they are provided with threaded bodies and securing hardware.
• Vacuum tightness checked 2 X 10^-10 atmospheric cc/sec. – helium mass spectrometer.

Gas/fluid and rotary/rectilinear motion introduction can also be made easily using these devices.

ACCESSORIES

IVI has a host of related accessories that may be used in conjunction with our feedthroughs to simplify your process applications. IVI has solved applications too numerous to mention here – please ask. Some of these are unique, performing difficult tasks in solving process applications.
ACCESSORIES include:

• High power flexible insulated electrical power bus leads. Very handy, as they easily connect, are flexible and are capable of carrying high current. – over 3000 amperes.
  They provide convenient and safe electrical connection from power supply to source feedthroughs.
• High power electrical switches that provide the operation of multiple sources from one power supply.
• Manual and power driven versions are available for automatically operated applications.

HIGH CURRENT FEEDTHROUGHS

ROTARY MOTION FEEDTHROUGHS

FOR VERY HIGH VACUUM/CONTROLLED ATMOSPHERE APPLICATIONS

These rotary motion devices are dependable and perform at very high vacuum levels delivering high torque at most speeds normally encountered. IVI Series 8610 Rotary Motion Devices (RMDs) have been installed into production equipment and performed, without failure, for decades with little or no maintenance.

In comparison to another type seal, IVI’s Series 8610 RMDs:

• Are not susceptible to magnetic fields
• Can withstand reasonable temperatures without water cooling
• Do not present drag torque stiffness
• Are less expensive.

In comparison to bellows sealed rotary motion devices, IVI’s Series 8610 RMDs:

• Do not present catastrophic failure problems
• Do not have varying torque loading
• Are less expensive.

IVI’s Series 8610 RMDs are:

• Ideally suited to high torque applications
• Provided with differential pumpout as well as simple maintenance connection for ease of operation
• Standard shaft lengths as shown.  If you require other lengths, please inquire.

ACCESSORIES

FLEXIBLE HIGH POWER WATER-COOLED BUS LEADS

Handle up to 3000 amperes of power.
Available in the following standard lengths: 2-ft, 4-ft, 8-ft, 12-ft

ORDER NUMBERS:

• 9723-6266-0024 (2-ft)
• 9723-6266-0048 (4-ft)
• 9723-6266–0096 (8-ft)
• 9723-6266-0144 (12-ft)